Product Features
- * 316L Stainless steel porous media and hardware connection
- * High temperature and dynamic pressure applications
- * Variety of end connections
- ASFLOW Diffusers quickly vent vacuum chambers to atmosphere which decreases cycle time and increases throughput
- lDiffusers provide uniform and laminar gas flows without disturbing particles in the chamber
- These diffusers also remove particles greater than 0.0025 ㎛ from incoming gas minimizing defects on the wafer
Specification
|
Particle Removal Size |
≥ 0.0025 ㎛ |
|---|---|
|
Retention |
Greater than 99.99 % removal of all particles down to 0.0025 ㎛ |
|
Rated Flow |
0 ~ 10,000 SLPM |
|
Materials |
316L Stainless Steel |
|
Particle Shedding |
Zero particle contribution above background (<1 particle/ft3) per SEMI F70-0302 test method |
|
Max. Operating Temperature for Inlet Gas |
460 °C without O-ring 100 °C with O-ring |
Performance Data
Ordering Information
|
Product |
Connection Size |
Connection Type |
||||||
|---|---|---|---|---|---|---|---|---|
|
DFS (Diffuser) |
04 |
1/4” |
25 |
KF Clamp |
MV |
Male |
NW |
KF Clamp ISO Clamp |
|
06 |
3/8” |
40 |
LOK |
Lok |
||||
|
08 |
1/2” |
50 |
BW |
Butt Weld |
||||
|
12 |
3/4” |
|||||||
* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.
Dimension
DFS-04-Series
|
Ordering No. |
Membrane Size |
Total Size |
Remarks |
||
|---|---|---|---|---|---|
|
A (Φ) |
B (㎜) |
C (Φ) |
D (㎜) |
||
|
DFS-04MV-001 |
20 |
38 |
23.5 |
64.5 |
|
|
DFS-04MV-002 |
20 |
53 |
23.5 |
79.5 |
|
|
DFS-04MV-003 |
20 |
120 |
23.5 |
146.5 |
|
|
DFS-04MV16NW-001 |
15 |
55 |
30 |
102.2 |
ISO Clamp |
|
DFS-04MV16NW-002 |
15 |
85 |
30 |
132.2 |
ISO Clamp |
|
DFS-04MV25NW-001 |
20 |
57 |
40 |
104 |
ISO Clamp |
|
DFS-04MV25NW-002 |
15 |
57.5 |
40 |
104 |
ISO Clamp |
|
DFS-04MV25NW-003 |
15 |
37 |
40 |
83.5 |
ISO Clamp |
* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.
DFS-08-Series
|
Ordering No. |
Membrane Size |
Total Size |
Remarks |
||
|---|---|---|---|---|---|
|
A (Φ) |
B (㎜) |
C (Φ) |
D (㎜) |
||
|
DFS-08MV-001 |
30 |
120 |
30 |
170 |
|
|
DFS-08MV-002 |
30 |
80 |
30 |
120 |
|
|
DFS-08MV-003 |
30 |
40 |
30 |
80 |
|
|
DFS-08MV-004 |
15 |
85 |
23.8 |
124 |
|
|
DFS-08MV25NW-001 |
15 |
65 |
40 |
126 |
KF Clamp |
|
DFS-08MV40NW-001 |
30 |
49 |
55 |
94 |
KF Clamp |
|
DFS-08MV40NW-002 |
30 |
120 |
55 |
167 |
KF Clamp |
|
DFS-08MV40NW-003 |
30 |
80 |
55 |
127 |
KF Clamp |
|
DFS-08BW-001 |
30 |
40 |
30 |
82.5 |
KF Clamp |
* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.
DFS-12-Series
|
Ordering No. |
Membrane Size |
Total Size |
Remarks |
||
|---|---|---|---|---|---|
|
A (Φ) |
B (㎜) |
C (Φ) |
D (㎜) |
||
|
DFS-12MV-001 |
30 |
120 |
33.3 |
166 |
|
|
DFS-12MV-002 |
30 |
120 |
33.3 |
166 |
|
* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.
DFS-25-Series
|
Ordering No. |
Membrane Size |
Total Size |
Remarks |
||
|---|---|---|---|---|---|
|
A (Φ) |
B (㎜) |
C (Φ) |
D (㎜) |
||
|
DFS-25NW40NW-001 |
30 |
120 |
55 |
165 |
|
|
DFS-25NW40NW-002 |
30 |
120 |
55 |
255 |
|
* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.
DFS-M28-Series / DFS-M30-Series
|
Ordering No. |
Membrane Size |
Total Size |
Remarks |
|||
|---|---|---|---|---|---|---|
|
(Φ) |
(㎜) |
A (Φ) |
B (㎜) |
|||
|
DFS-M28-Series |
DFS-M28-001 |
30 |
120 |
46 |
170 |
1 pic, with hole cover |
|
DFS-M28-002 |
30 |
120 |
46 |
161.8 |
1 pic |
|
|
DFS-M28-003 |
30 |
120 |
46 |
161.8 |
1 pic, without O-ring |
|
|
DFS 430 |
30 |
120 |
46 |
421.8 |
3 pic |
|
|
DFS-M30-Series |
DFS-M30-003 |
30 |
120 |
53.1 |
168.8 |
|
|
DFS 307 |
30 |
120 |
53 |
307 |
2 pic, with hole cover |
|
|
DFS 437 |
30 |
120 |
53 |
437 |
3 pic, with hole cover |
|
* ASFLOW Diffusers can be tailored to customers’ needs with a variety of end connections. Please contact us.