High Performance Hastelloy Gas Filter

Product Features

Specification

Particle Removal Size

≥ 0.0025 ㎛

Retention

≥ LRV 9 of Particle down to 0.0025 ㎛

Rated Flow

50 SLPM

150 SLPM

300 SLPM

Materials

Filter element

Hastelloy C-22

Electro polished housing

Element Operating Conditions

Max. inlet pressure

21 MPa (210 kfg/㎠) at 20 °C

Max. differential pressure

15 MPa (153 kfg/㎠) at 20 °C

Max. operating temperature

460 °C (Inert gas)

He Leak Rating

1 x 10-10 atm·cc/sec

Surface Finish Interior

≤ Ra 5 μinch

Performance Data

HHF 50
HHF 150
HHF 300

Ordering Information

FLT

Product

HHF

Series

50

Rated Flow
(SLPM)

04

Connection
Size

MV

Connection
Type

Product

Series

Rated Flow

(SLPM)

Connection Size

Connection Type

FLT

(Filter)

HSF

High Flow

Hastelloy Filter

50

04

1/4”

MV

Male

     

150

06

3/8”

LOK

Lok

     

300

08

1/2”

   
       

12

3/4”

   

Dimension

Ordering No.

A (㎜)

B (㎜)

C (㎜)

D (㎜)

FLT-HHF50-04MV

84

15.5

19.05

18

FLT-HHF150-04MV

84

15.5

38.1

27

FLT-HHF150-08MV

84

15.5

38.1

27

FLT-HHF300-04MV

127

15.5

38.1

27

FLT-HHF300-08MV

127

15.5

38.1

27

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